Instructor: Dr. Henk van Zeijl

This 5-day course on Integrated Circuit and MEMS Fabrication Technologies.

This course offers a comprehensive introduction to the core fabrication technologies behind Integrated Circuits (ICs) and Microelectromechanical Systems (MEMS)—two pillars of modern microelectronic systems. Participants will explore how foundational technologies like doping, photolithography, etching, and thin-film deposition converge to create the devices that power everything from smartphones to spacecraft.

Designed to bridge the gap between device physics and electronic characteristics, the course examines the intricate process flows of CMOS manufacturing and MEMS fabrication, highlighting how these technologies are integrated in real-world applications. A detailed discussion of 3D micromachining techniques further reveals the power of MEMS in creating multifunctional microsystems.

What You’ll Learn

• The basic physical principles of microelectronic devices

• Key IC fabrication technologies and how they shape device behavior

• Silicon bulk and surface micromachining for MEMS fabrication

• Complete CMOS process flow and technology integration challenges

• The evolution and ecosystem of modern microfabrication

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